Contact us:

NL: +31622913403

Office Plasma Support
Hooiland 133
7641 JA Wierden
Netherlands
Tel.: +31-622913403
Email: Office Plasma Support

Brooks Cluster system;

1 Cassette module and one Dealer chamber
An excellent opportunity to upgrade/replace your existing STS Cassette and/ or STS dealer system for more reliable operation. System is used and was working fine when shut down.

Huber Unistat 140 chiller;

air-cooled and water cooled

RIE module;

non-clamped, non-helium back side cooled

Bettatech CU500 chiller.


AOE module

For oxide etching;

Maglev turbo pumps


Dry pump

Several Edwards dry pumps in house

 

 

 

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