Brooks Cluster system;

1 Cassette module and one Dealer chamber
An excellent opportunity to upgrade/replace your existing STS Cassette and/ or STS dealer system for more reliable operation. System is used and was working fine when shut down.

Huber Unistat 140 chiller;

air-cooled and water cooled

RIE module;

non-clamped, non-helium back side cooled

Bettatech CU500 chiller.

AOE module

For oxide etching;

Maglev turbo pumps

Dry pump

Several Edwards dry pumps in house