Service Surface Technology Systems, STS

Plasma Support services Surface Technology Systems, STS
RIE, PECVD, PVD Sputtering, ICP incl. ASE 308PC, 310PC,315PC, 320PC, 310/320, 310/340, 340 PC and 340PF, 508PC, PF505, several Twin machines, Multiplex systems, STS and Brooks Cluster systems